Piezoelectric-based microactuator arrangement for mitigating out-of-plane force and phase variation of flexure vibration

摘要

An approach to a piezoelectric (PZT) device, such as a hard disk drive microactuator, includes one or more layers of poled PZT material, with top and bottom surfaces coupled with respective electrode layers coupled with a power source to drive the active PZT layer(s). The electrode layers have different thicknesses, where the particular thicknesses may be configured to mitigate the variation of out-of-plane motion or bending associated with operational variations in the z-height between a corresponding actuator arm and recording medium and, likewise, the phase variation of flexure vibration.