EUV Method of fabricating of pellicle for EUV lithography and appartus of fabricating of the same

摘要

A method of making a pellicle is provided. The method for manufacturing the pellicle includes the steps of preparing a preliminary pellicle structure, providing the preliminary pellicle structure in an etching solution to etch the preliminary pellicle structure, and simultaneously taking out the etched preliminary pellicle structure from the etching solution and etching It may include the step of heat-treating and drying the preliminary pellicle structure.