Method for controlling an optical scanner, optical scanner and laser scanning microscope

摘要

A method for controlling an optical scanner (14) which has a beam-deflecting element (31) for deflecting a beam of optical radiation and a drive unit (30, 30 ', 35) for moving the beam-deflecting element (31), the drive unit (30 , 30 ', 35) is controlled according to control signals and - in a determination step for at least one predetermined frequency, a current value of a drive unit transfer function that determines the response of the drive unit (30, 30', 35) to control signals for a predetermined target movement or change a target movement is determined, characterized in that the control takes place on the basis of an optical transfer function and the optical transfer function is corrected in a correction step as a function of the current value of the drive unit transfer function.