首页>
外国专利>
BODE FINGERPRINTING FOR CHARACTERIZATIONS AND FAILURE DETECTIONS IN PROCESSING CHAMBER
BODE FINGERPRINTING FOR CHARACTERIZATIONS AND FAILURE DETECTIONS IN PROCESSING CHAMBER
展开▼
机译:BODE用于处理室中的特征和故障检测的指纹识别
展开▼
页面导航
摘要
著录项
相似文献
摘要
A non-transitory computer-readable storage medium stores instructions, which when executed by a processing device of a diagnostic server, cause the processing device to perform certain operations. The operations include receiving, from a processing chamber, (i) measurement values of a combined signal that is based on an injection of an alternating signal wave onto a first output signal of a controller of the processing chamber, and (ii) measurement values of a second output signal of the controller that incorporates feedback from the processing chamber. The operations further include generating, based on the measurement values of the combined signal and the measurement values of the second output signal of the controller, a baseline bode fingerprint pertaining to a state associated with the processing chamber. The operations further include storing, in computer storage, the baseline bode fingerprint to be used in performing diagnostics of the processing chamber.
展开▼