Hermetically sealed housings comprising getters, optoelectronic or MEMS devices comprising such hermetic housings, and related manufacturing methods

摘要

The present invention relates to a hermetic housing (10a) for an optoelectronic device (11) or MEMS device configured to form an enclosure (12) in which a low pressure or vacuum prevails, the hermetic housing (10a) comprising: an optical window 14 that transmits the at least one wavelength λ; and and a layer (15a) of getter material, adapted to trap gases present in the enclosure, and deposited on the optical window opposite the enclosure. A layer of this getter material has the following formula: Thickness greater than 60 nm ( ) and a porosity P ranging from 10% to 70%, where λ corresponds to the at least one wavelength of interest, and k is the layer of the getter material for the at least one wavelength of interest in the optical window. Corresponds to the extinction coefficient of the material.