首页> 外国专利> HERMETIC HOUSING COMPRISING A GETTER, OPTOELECTRONIC COMPONENT OR MEMS DEVICE INCORPORATING SUCH A HERMETIC HOUSING AND ASSOCIATED PRODUCTION METHOD

HERMETIC HOUSING COMPRISING A GETTER, OPTOELECTRONIC COMPONENT OR MEMS DEVICE INCORPORATING SUCH A HERMETIC HOUSING AND ASSOCIATED PRODUCTION METHOD

机译:密封壳体,包括包含这种密封壳体和相关的生产方法的吸气剂,光电子成分或MEMS器件

摘要

The invention concerns a hermetic housing (10a) for an optoelectronic component (11) or MEMS device, configured to form an enclosure (12) within which a low pressure or vacuum prevails, said hermetic housing comprising: an optical window (14) transparent to at least one wavelength of interest (λ); and a layer of getter material (15a) configured to capture the gases present in the enclosure and disposed on the optical window facing the enclosure. This getter material has a thickness (et), greater than 60 nanometres, and a porosity (P) between 10 and 70% so as to satisfy the following relation: formula (I) with λ corresponding to the at least one wavelength of interest, and k corresponding to the extinction coefficient of the material of the layer of getter material for the at least one wavelength of interest of the optical window.
机译:本发明涉及一种用于光电子组件(11)或MEMS装置的密封壳体(10a),所述密封壳体(11)或MEMS装置构造成在该外壳(12)内,所述密封壳体的低压或真空普及,所述密封壳体包括:光学窗口(14)透明 至少一个兴趣波长(λ); 和一层吸气剂材料(15a),其被配置为捕获外壳中存在的气体并设置在面向外壳的光学窗口上。 该吸气剂材料具有厚度(ET),大于60纳米,孔隙率(P)在10到70%之间,以满足以下关系:用λ对应于感兴趣的至少一个波长的λ, 并且K对应于吸气剂层的材料的消光系数,用于光学窗口的至少一个波长的吸气剂。

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