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HERMETIC HOUSING COMPRISING A GETTER, OPTOELECTRONIC COMPONENT OR MEMS DEVICE INCORPORATING SUCH A HERMETIC HOUSING AND ASSOCIATED PRODUCTION METHOD
HERMETIC HOUSING COMPRISING A GETTER, OPTOELECTRONIC COMPONENT OR MEMS DEVICE INCORPORATING SUCH A HERMETIC HOUSING AND ASSOCIATED PRODUCTION METHOD
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机译:密封壳体,包括包含这种密封壳体和相关的生产方法的吸气剂,光电子成分或MEMS器件
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摘要
The invention concerns a hermetic housing (10a) for an optoelectronic component (11) or MEMS device, configured to form an enclosure (12) within which a low pressure or vacuum prevails, said hermetic housing comprising: an optical window (14) transparent to at least one wavelength of interest (λ); and a layer of getter material (15a) configured to capture the gases present in the enclosure and disposed on the optical window facing the enclosure. This getter material has a thickness (et), greater than 60 nanometres, and a porosity (P) between 10 and 70% so as to satisfy the following relation: formula (I) with λ corresponding to the at least one wavelength of interest, and k corresponding to the extinction coefficient of the material of the layer of getter material for the at least one wavelength of interest of the optical window.
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