Method of Pressure Measurement without calibration in micro-fabricated vacuum gauge devices

摘要

One way to determine the pressure (for example inside a vacuum housing, such as a MEMS chip), without prior calibration, is provided by using a model and a set of one or more gauge (s). ) (eg Pirani gauges, thermistor gauges, thermocouple gauges) having distinct geometries. In order to calculate the pressure from the electrical measurements made on the gauges, there are several intermediate steps and an analytical model describes each of these steps. In addition to electrical measurements, other inputs are needed, such as material properties and some dimensions, which may not be known precisely. Several different gauge geometries are available which can be combined to determine the vacuum (pressure) level without first knowing the values of these inputs. Figure for the abstract: Fig. 1