首页> 外国专利> BONDED SEMICONDUCTOR DEVICES HAVING PROGRAMMABLE LOGIC DEVICE AND NAND FLASH MEMORY AND METHODS FOR FORMING THE SAME

BONDED SEMICONDUCTOR DEVICES HAVING PROGRAMMABLE LOGIC DEVICE AND NAND FLASH MEMORY AND METHODS FOR FORMING THE SAME

机译:具有可编程逻辑器件和NAND闪存的粘合半导体器件和用于形成相同的方法

摘要

First semiconductor structures are formed on a first wafer. At least one of the first semiconductor structures includes a programmable logic device, an array of static random-access memory (SRAM) cells, and a first bonding layer including first bonding contacts. Second semiconductor structures are formed on a second wafer. At least one of the second semiconductor structures includes an array of NAND memory cells and a second bonding layer including second bonding contacts. The first wafer and the second wafer are bonded in a face-to-face manner, such that the at least one of the first semiconductor structures is bonded to the at least one of the second semiconductor structures. The first bonding contacts of the first semiconductor structure are in contact with the second bonding contacts of the second semiconductor structure at a bonding interface. The bonded first and second wafers are diced into dies. At least one of the dies includes the bonded first and second semiconductor structures.
机译:第一半导体结构形成在第一晶片上。第一半导体结构中的至少一个包括可编程逻辑器件,静态随机存取存储器(SRAM)单元的阵列,以及包括第一接合触头的第一键合层。第二半导体结构形成在第二晶片上。第二半导体结构中的至少一个包括NAND存储器单元的阵列和包括第二接合触头的第二键合层。第一晶片和第二晶片以面对面的方式粘合,使得第一半导体结构中的至少一个结合到第二半导体结构中的至少一个。第一半导体结构的第一键合触点与第二半导体结构的第二键合触头接触在粘合界面中。将粘合的第一和第二晶片切成死亡。其中至少一个模具包括粘合的第一和第二半导体结构。

著录项

  • 公开/公告号US2021305259A1

    专利类型

  • 公开/公告日2021-09-30

    原文格式PDF

  • 申请/专利权人 YANGTZE MEMORY TECHNOLOGIES CO. LTD.;

    申请/专利号US202117344942

  • 发明设计人 WEIHUA CHENG;JUN LIU;

    申请日2021-06-10

  • 分类号H01L27/11;H01L21/76;H01L23;

  • 国家 US

  • 入库时间 2024-06-14 22:08:51

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