Foreign object detection apparatus, foreign material detection method, and storage medium

摘要

An object of the present invention is to provide a technology capable of accurately detecting foreign substances flowing through a flow path. The flow path portions 15A to 15K constituting the flow passages 17A to 17K through which the fluid supplied to the object W flows, and the flow direction of the fluid in the flow passage portions 15A to 15K and the optical path intersect, A laser light irradiation unit 51 for irradiating laser light into the flow passages 15A to 15K; , 45B), a detection unit 6 for detecting a foreign object in the fluid, and a light path between the light receiving elements 45A and 45B and the flow passages 15A to 15K, and a light irradiating unit to the fluid The device is configured to include a filter unit 57 that blocks Raman scattered light generated by irradiating light from 51 and transmits Rayleigh scattered light to light receiving elements 45A and 45B.