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Spurious mode suppression in bulk acoustic wave resonator
Spurious mode suppression in bulk acoustic wave resonator
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机译:散装声波谐振器中的虚假模式抑制
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摘要
Embodiments provide a solidly-mounted bulk acoustic wave (BAW) resonator and method of making same. In embodiments, the BAW resonator may include a planarization portion in an inactive region of the BAW resonator that is coplanar with a piezoelectric layer of the BAW resonator in an active region of the BAW resonator. Other embodiments may be described and claimed.
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