SPURIOUS MODE SUPPRESSION USING METAL MESHED FRAME AROUND BULK ACOUSTIC WAVE RESONATORS

摘要

An apparatus is provided which comprises: a substrate, a piezoelectric resonator separated from a surface of the substrate by a void region, a first electrode coupled to a first surface of the piezoelectric resonator parallel to the substrate surface, and a second electrode coupled to a second surface of the piezoelectric resonator parallel to the substrate surface, the second electrode comprising a solid metal rectangle bordered on at least two sides with a metal mesh. Other embodiments are also disclosed and claimed.