DEVICE FOR CHARACTERISING, FOR CHECKING AND/OR FOR TESTING A COMPONENT, IN PARTICULAR A MICROELECTROMECHANICAL SYSTEM, SYSTEM, AND METHOD

摘要

The invention relates to a device (1) for characterising, for checking and/or for testing a component (10), in particular a microelectromechanical system, characterised in that the device (1) comprises a support (2) and an exciter device (20), it being possible to generate a shear wave (30) on the support (2) with the aid of the exciter device (20).