METHOD FOR MANUFACTURING A SILICON-BASED CORIOLIS-FORCE-BASED FLOW SENSING DEVICE, CORIOLIS-FORCE-BASED FLOW SENSING DEVICE, AND SYSTEM FOR MEASURING A PROPERTY OF A FLUID

摘要

Embodiments of a Coriolis-force-based flow sensing device and embodiments of methods for manufacturing embodiments of the Coriolis-force-based flow sensing device, comprising the steps of: forming a driving electrode; forming, on the driving electrode, a first sacrificial region; forming, on the first sacrificial region, a first structural portion with a second sacrificial region buried therein; forming openings for selectively etching the second sacrificial region; forming, within the openings, a porous layer having pores; removing the second sacrificial region through the pores of the porous layer, forming a buried channel; growing, on the porous layer and not within the buried channel, a second structural portion that forms, with the first structural region, a structural body; selectively removing the first sacrificial region thus suspending the structural body on the driving electrode.