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RESIN COMPOSITION CURED FILM AND PATTERNED CURED FILM FORMED FROM SAME METHOD FOR PRODUCING CURED FILM AND METHOD FOR PRODUCING PATTERNED CURED FILM
RESIN COMPOSITION CURED FILM AND PATTERNED CURED FILM FORMED FROM SAME METHOD FOR PRODUCING CURED FILM AND METHOD FOR PRODUCING PATTERNED CURED FILM
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机译:树脂组合物固化薄膜和图案化固化膜由相同的制备固化膜的制备方法和制备图案化固化膜的方法
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摘要
The resin composition containing the following (a) component, (b) component, and (c) component. (a) a polyimide precursor having a structural unit represented by the following formula (1); (b) an exposed surface solubilizer; (c) a compound that generates a radical by irradiation with actinic light (in formula (1), R 1 is a tetravalent organic group, R 2 is a divalent organic group, R 3 and R 4 are each independently a hydrogen atom; It is an alkyl group, a cycloalkyl group, or a monovalent organic group having a carbon-carbon unsaturated double bond.)
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