ReS2 METHOD OF MANUFACTURING A RES2 THIN LAYER AND METHOD OF MANUFACTURING A PHOTO DETECTOR USING THE SAME

摘要

Provided are a method for forming a ReS 2 thin film and a method for forming a detector using the same. The ReS 2 thin film prepares a substrate including an insulating film, treats the surface of the insulating film of the substrate with a seed promoter, and directly transfers a polycrystalline ReS 2 thin film on the substrate surface-treated with the seed promoter through a chemical vapor deposition process. It involves forming directly. In the case of chemical vapor deposition, the process space in which the deposition process is performed is heated to 330°C for 12 minutes and maintained at 330°C for 5 minutes to stabilize the thermal process, and the process space is heated at 760°C for 20 minutes and maintained for 15 minutes. and growing the ReS 2 thin film.