MONOLITHIC INTEGRATED OPTICAL ANALOG-TO-DIGITAL CONVERSION SYSTEM BASED ON LITHIUM NIOBATE-SILICON WAFER AND PREPARATION METHOD THEREFOR

摘要

Disclosed are a monolithic integrated optical analog-to-digital conversion system based on a lithium niobate-silicon wafer, and a preparation method therefor, wherein a new type of wafer (a lithium niobate-silicon wafer) is used to achieve an electro-optic multi-device monolithic integrated optical analog-to-digital conversion system comprising an electro-optic modulator array, an adjustable delay line array and electronic circuits, etc. A variety of devices are permitted to be manufactured on a same chip, which ensures the performance advantages and stability of the system. Furthermore, the present invention proposes a preparation method for a CMOS compatible system, such that the monolithic integrated optical analog-to-digital conversion system based on the lithium niobate-silicon wafer can be implemented on the platforms of most chip manufacturers.