PREPARATION PROCESS FOR GRAPHENE RESONANT GAS SENSOR BASED ON DOPED METAL ATOMS

摘要

The present disclosure belongs to the technical field of sensors, relates to a graphene resonant gas sensor, and in particular, to a graphene resonant gas sensor based on doped metal atoms and a preparation process therefor. In the present disclosure, the metal atoms are embedded in a graphene resonant beam, and a transition metal layer may use the doped metal atoms as anchor points to be tightly adsorbed to the surface of the graphene resonant beam, so that the quality of surface contact between the transition metal layer and the graphene resonant beam is improved, and the problems such as low quality and low sensitivity of conventional resonant gas sensors are effectively solved.