Internal pressure adjusting system, robot system, and internal pressure adjusting method

摘要

To provide an internal pressure adjustment system which is effective for simplification of a structure, a robot system and an internal pressure adjustment method.SOLUTION: An internal pressure adjustment system 3 comprises: an air supply part 100 which supplies a noncombustible gas into a storage space 51 of a robot 2; an air supply pressure change part 200 which changes an air supply pressure of the noncombustible gas by the air supply part 100; an air exhaust part 300 which discharges the gas from the storage space 51; and a gas pressure drive type on-off valve 410 which performs changeover between opening and closing of the air exhaust part 300 according to the air supply pressure so as to open the air exhaust part 300 according to rise of the air supply pressure and to close the air exhaust part 300 according to reduction of the air supply pressure.SELECTED DRAWING: Figure 1