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INTERNAL PRESSURE ADJUSTMENT SYSTEM, ROBOT SYSTEM, AND INTERNAL PRESSURE ADJUSTMENT METHOD

机译:内部压力调整系统,机器人系统以及内部压力调整方法

摘要

An internal pressure adjustment system 3 includes a gas supply line 100 that supplies incombustible gas to a housing space 51 of a robot 2, an exhaust line 300 that exhausts gas from the housing space 51, and an on-off valve 410 of a gas pressure driven type that switches between opening and closing of the exhaust line 300 in accordance with the gas supply pressure so that the exhaust line 300 is opened in response to an increase in the gas supply pressure and the exhaust line 300 is closed in response to a decrease in the gas supply pressure.
机译:内部压力调节系统3包括向机器人2的容纳空间51供给不燃性气体的气体供给管线100,从容纳空间51排出气体的排气管线300以及气压的开关阀410。驱动类型,其根据供气压力在排气管线300的打开和关闭之间切换,从而响应于供气压力的增加排气管线300打开,而响应于降低的压力关闭排气管线300供气压力。

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