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MULTI-POINT THERMOCOUPLES AND ASSEMBLIES FOR CERAMIC HEATING STRUCTURES
MULTI-POINT THERMOCOUPLES AND ASSEMBLIES FOR CERAMIC HEATING STRUCTURES
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机译:用于陶瓷加热结构的多点热电偶和组件
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摘要
Multi-point thermocouples and assemblies are disclosed for ceramic heating structures. The disclosed embodiments provide multi-point connections in distinct areas to provide good temperature-sensing contacts between metal thermocouples and ceramic bodies while also providing improved flexibility. As such, cracking of ceramic bodies for heating structures is avoided. For one embodiment, assemblies including a multi-point thermocouple and a ceramic body are used in bake plates for processing systems that process microelectronic workpieces. The metal thermocouple has a flat surface used for connections to the ceramic body. Preferably, the thermocouple is relatively thin and provides improved connection sites and flexibility.
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