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MICRO-MACHINED THIN FILM LITHIUM NIOBATE ELECTRO-OPTIC DEVICES
MICRO-MACHINED THIN FILM LITHIUM NIOBATE ELECTRO-OPTIC DEVICES
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机译:微机械薄膜锂铌酸盐电光器件
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摘要
Optical devices and their fabrication from thin film lithium niobate are provided. In some embodiments, an optical device includes a substrate and an optical waveguide disposed on the substrate. The optical waveguide comprises lithium niobate. The optical waveguide has a central ridge extending laterally along the substrate. A pair of electrodes is disposed on opposite sides of the central ridge of the optical waveguide.
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