GROUP IV TRANSITION METAL COMPOUNDS, PREPARATION METHOD THEREOF AND PROCESS FOR THE FORMATION OF THIN FILMS USING THE SAME

摘要

The present invention relates to a Group 4 transition metal compound, a method for preparing the same, and a method for forming a thin film using the same, and the Group 4 transition metal compound according to the present invention is thermally stable, has excellent volatility, and has high storage stability. It is possible to provide a thin film containing a Group 4 transition metal of high density and high purity and a method for manufacturing the same.