GROUP IV TRANSITION METAL COMPOUNDS, PREPARATION METHOD THEREOF AND PROCESS FOR THE FORMATION OF THIN FILMS USING THE SAME

摘要

The present invention relates to a Group 4 transition metal compound, a method for manufacturing the same, and a method of forming a thin film using the Group 4 transition metal compound according to the present invention is thermally stable, has excellent volatility, has high storage stability, and is a precursor to this. It is possible to provide a high-density and high-purity Group 4 transition metal-containing thin film and a method for manufacturing the same.