METHOD AND SYSTEM FOR AUDIO RECOGNITION OF ARCING DURING SEMICONDUCTOR PROCESS

摘要

An arc detection system detects an arc within a semiconductor processing cleanroom environment. An arc detection system includes an array of microphones positioned within a cleanroom environment. The microphone receives sound waves within the cleanroom environment and generates an audio signal based on the sound waves. The arc detection system includes a control system that receives an audio signal from a microphone. The control system analyzes the audio signal and detects an arc in the cleanroom environment based on the audio signal. The control system may adjust the semiconductor process in real time in response to detection of the arc.