METHOD OF FORMING VANADIUM NITRIDE LAYER AND STRUCTURE INCLUDING THE VANADIUM NITRIDE LAYER

摘要

A method and system for depositing a layer of vanadium nitride on a substrate surface and structures and devices formed using the method are disclosed. An exemplary method includes depositing a layer of vanadium nitride on a substrate surface using a periodic deposition process. The periodic deposition process may include providing a vanadium halide precursor to the reaction chamber and separately providing a nitrogen reactant to the reaction chamber. The periodic deposition process may preferably be a thermal periodic deposition process.