Method for forming structure containing vanadium nitride layer and vanadium nitride layer

摘要

A method and system for depositing a vanadium nitride layer on the surface of a substrate and a structure and device formed using the method are disclosed.An exemplary method involves depositing a vanadium nitride layer on the surface of a substrate using a periodic deposition process. The periodic deposition process may include supplying a vanadium halide precursor to the reaction chamber, and separately supplying a nitrogen reactant to the reaction chamber. The periodic deposition process may desirably be a thermal cyclic deposition process.Diagram