METHOD FOR MANUFACTURING A METAL-BOROCARBIDE LAYER ON A SUBSTRATE

摘要

The present invention relates to a PVD process for coating a substrate having a layer comprising at least one microcrystalline metallic borocarbide phase. During the PVD process, the source output is pulsed such that one or more peaks indicate that the width of the half-intensity indicates the presence of a microcrystalline phase of the metallic borocarbide layer at a substrate temperature below 600° C. of the layer produced in this way. can be identified in the line spectrum.