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METROLOGY PARAMETER DETERMINATION AND METROLOGY RECIPE SELECTION
METROLOGY PARAMETER DETERMINATION AND METROLOGY RECIPE SELECTION
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机译:计量参数确定和计量配方选择
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摘要
A method of determining a patterning process parameter from a metrology target, the method including: obtaining a plurality of values of diffraction radiation from the metrology target, each value of the plurality of values corresponding to a different illumination condition of a plurality of illumination conditions of illumination radiation for the target; and using the combination of values to determine a same value of the patterning process parameter for the target.
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