Vapor phase corrosion cavity capable of adjusting internal pressure difference and vapor phase corrosion method using it

摘要

The present invention includes an upper cavity, a lower cavity, and a lifting control device, wherein the lifting control device is connected to the upper cavity so as to control vertical movement of the upper cavity, the lower cavity is fixed, and The lower cavity is provided with a cavity inlet port and a cavity outlet port, and is a vapor-phase corrosion cavity capable of adjusting the pressure difference between the inside and outside, and is connected to the cavity exhaust port of the lower cavity, and the pressure difference between the inside and outside of the vapor-phase corrosion cavity is controlled. Disclosed is a vapor-phase corrosion cavity having an adjustable internal and external pressure difference, which further includes an adjustable cavity suction force control device. The vapor-phase corrosion cavity according to the present invention capable of adjusting the pressure difference between the inside and the outside keeps the balance between the pressure inside and outside the cavity and avoids damage to the cavity made of a non-metallic material. The present invention further discloses a method of vapor-depositing a wafer by a vapor-deposition cavity capable of adjusting the pressure difference between the inside and the outside. [Selection diagram] Fig. 4