X-RAY DETECTOR HAVING DRIVER MICRO INTEGRATED CHIPS PRINTED ON PHOTODIODE LAYER

摘要

Provided are an X-ray detector including a plurality of pixel driving micro integrated chips separately fabricated from a photodiode layer and printed on the photodiode layer and a method for manufacturing the X-ray detector. The X-ray detector may include a photodiode layer and a driver layer. The photodiode layer may include a plurality of photodiodes and be configured to receive X-ray that have passed through a target object and convert the received X-ray to electric signals. The driver layer may be formed on the photodiode layer and include a plurality of micro driving integrated chips each coupled to two or more photodiodes in the photodiode layer. The plurality of pixel driving integrated chips may be manufactured separately from the photodiode layer and printed on the photodiode layer using a micro-transfer printing method.