SURFACE ANALYSIS METHOD, SURFACE ANALYSIS SYSTEM, AND SURFACE ANALYSIS PROGRAM

摘要

A surface analysis method according to one embodiment comprises: a step for acquiring a force curve based on a measurement of a sample surface by means of a scanning-type probe microscope provided with a probe; a step for calculating a differential curve by first-order-differentiating the force curve by a probe-surface distance that is the distance between the probe and the surface; a step for calculating, on the basis of the differential curve, the distance from the sample surface to the farthest peak as a breaking length of an organic material forming the sample surface; and a step for outputting the breaking length.