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Nanopore FET Sensor with Non-Linear Potential Profile

机译:纳米孔FET传感器,具有非线性电位型材

摘要

In a first aspect, the present invention relates to a nanopore field-effect transistor sensor (100), comprising: i) a source region (310) and a drain region (320), defining a source-drain axis; ii) a channel region (330) between the source region (310) and the drain region (320); iii) a nanopore (400), defined as an opening in the channel region (330) which completely crosses through the channel region (330), oriented at an angle to the source-drain axis, having a first orifice (410) and a second orifice (420), and being adapted for creating a non-linear potential profile between the first (410) and second (420) orifice.
机译:在第一方面,本发明涉及一种纳米孔场 - 效应晶体管传感器( 100 ),包括:i)源区( 310 )和漏区( 320 ),定义源极 - 漏极轴; ii)源区( 310 )和漏区( 320 )之间的沟道区( 330 ); iii)纳米孔( 400 )定义为沟道区( 330)中的开口,其完全穿过沟道区( 330 410 )和第二孔口( 420 ),并适于产生非线性的第一( 410 )和第二( 420 )孔之间的潜在轮廓。

著录项

  • 公开/公告号US2021184053A1

    专利类型

  • 公开/公告日2021-06-17

    原文格式PDF

  • 申请/专利权人 IMEC VZW;

    申请/专利号US201816761712

  • 申请日2018-07-24

  • 分类号H01L29/786;H01L29/51;H01L29/10;H01L21/308;G01N27/414;

  • 国家 US

  • 入库时间 2024-06-14 21:40:48

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