Container for evaporating raw material and solid evaporation system using evaporative raw material container

摘要

PROBLEM TO BE SOLVED: To provide an evaporation raw material vessel excellent in corrosion resistance.;SOLUTION: An evaporation raw material vessel 100 for storing and evaporating a metal halogen compound for thin film deposition comprises: a vessel main body 2 having a vessel wall 12; a lid body 4 having a carrier gas inlet 16 and a mixed gas outlet 18; a fastening member 6 for fixing the vessel main body 2 and the lid body 4; and a joint member 8. The vessel wall 12 of the vessel main body 2 is constituted of copper having a purity of 99-99.9999%, aluminum having a purity of 99-99.9999% or titanium having a purity of 99-99.9999%, and each of the vessel main body 2, the lid body 4, the fastening member 6 and the joint member 8 is subjected to fluororesin coating and/or electrolytic polishing.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2020,JPO&INPIT