The size of the deflection angle of the reflecting layer of the mirror device is inversely proportional to the weight of the movable portion, and the structure is not suitable for both the long distance and the wide angle.In order to enlarge the surface area of the reflective layer, the winding between the winding ends of the driving Coyle which is wound around the peripheral edge of the main surface of the movable portion connected by the torsion bar within the frame of the frame shaped support substrate is made flat by smoothing layers. A reflective layer may be provided in the upper surface of the driving Coyle.Diagram
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