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QUALITY MANAGEMENT SYSTEMS AND QUALITY MANAGEMENT PROCEDURES
QUALITY MANAGEMENT SYSTEMS AND QUALITY MANAGEMENT PROCEDURES
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机译:质量管理系统和质量管理程序
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摘要
An administrative system (1) has an information acquisition section (25) to capture a shape change measure of a template mask and a prediction section to predict the remaining number of uses of the template mask based on the shape change measure of the template mask.
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