POLYCRYSTALLINE SILICON PRODUCTION DEVICE AND POLYCRYSTALLINE SILICON PRODUCTION METHOD

摘要

The present invention reduces contamination of polycrystalline silicon by using a corrosion-resistant valve. A polycrystalline silicon production device (1) is provided with: a reactor (10); and an exhaust valve (30) that controls opening/closing of an exhaust route (12) of exhaust gas to be exhausted from the reactor (10). The exhaust valve (30) has a valve body (31) and a reception seat (32). The valve body (31) and/or the reception seat (32) has a surface in contact with exhaust gas that is formed from a corrosion-resistant material.