首页> 外国专利> RESIN LENS MANUFACTURING METHOD USING DEVELOPING SOLUTION AND RINSING SOLUTION, AND RINSING SOLUTION

RESIN LENS MANUFACTURING METHOD USING DEVELOPING SOLUTION AND RINSING SOLUTION, AND RINSING SOLUTION

机译:使用显影溶液和漂洗溶液的树脂透镜制造方法,并漂洗溶液

摘要

[Problem] To provide a resin lens manufacturing method using a developing solution and a rinsing solution that employ specific organic solvents. [Solution] A resin lens manufacturing method comprising: a step for coating a support on which a pattern having an opening is formed with a negative type photosensitive resin composition; an imprinting step for bringing the negative type photosensitive resin composition and a mold having a reverse pattern of a target lens shape and a light-blocking film into contact with each other; a photocuring step for forming a photocured portion in the opening by exposing the negative type photosensitive resin composition through the mold; a mold releasing step for separating the photocured portion and the mold; a developing step for removing an uncured portion of the negative type photosensitive resin composition using a developing solution containing γ-butyrolactone to expose the photocured portion and form a photocured product; a rinsing step for performing rinsing treatment using a rinsing solution containing a specific compound; a drying step for removing the rinsing solution; and a step for exposing the whole surface of the photocured product.
机译:[问题]提供使用显影液的树脂透镜制造方法和采用特异性有机溶剂的漂洗溶液。 [溶液]一种树脂透镜制造方法,包括:用于涂覆具有开口形成有阴性型光敏树脂组合物的图案的步骤;用于使负型光敏树脂组合物和具有靶镜片形状的反向图案的模具的压印步骤和彼此接触的透光膜;通过将负型光敏树脂组合物暴露通过模具将负型光敏树脂组合物暴露于开口中形成光封闭的光浸渍步骤;一种用于分离光电化部分和模具的模具释放步骤;使用含有γ-丁内酯的显影溶液去除阴性型光敏树脂组合物的未固化部分的显影步骤,以暴露光电部分并形成光加工产品;使用含有特定化合物的漂洗溶液进行漂洗处理的冲洗步骤;除去漂洗溶液的干燥步骤;并且曝光了光加工产品的整个表面的步骤。

著录项

  • 公开/公告号WO2021095390A1

    专利类型

  • 公开/公告日2021-05-20

    原文格式PDF

  • 申请/专利权人 NISSAN CHEMICAL CORPORATION;

    申请/专利号WO2020JP37277

  • 发明设计人 SUZUKI TOMOYA;ADACHI ISAO;

    申请日2020-09-30

  • 分类号G03F7/004;G03F7/027;G03F7/32;G03F7/40;H01L21/027;B29C59/02;

  • 国家 JP

  • 入库时间 2022-08-24 18:51:41

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