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Negative type photosensitive siloxane composition, and curing film using the same and manufacturing method of the electronic element
Negative type photosensitive siloxane composition, and curing film using the same and manufacturing method of the electronic element
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机译:阴性型光敏硅氧烷组合物,使用相同的电子元件的制造方法固化膜
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摘要
Problem to be solved: to provide a negative type photosensitive siloxane composition capable of forming a hardened film having excellent heat resistance and crack limit film thickness.In accordance with the present invention, a negative type photosensitive siloxane composition containing polysiloxane with particular content of silanol, a specific Photobase generator particle, and a solvent is provided. The content of silanol is measured by FT-IR.No selection
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