MICRO BOLOMETER AND MICRO BOLOMETER MANUFACTURING METHOD

摘要

The microbolometer according to the embodiment includes an infrared reflecting layer disposed on a substrate, a membrane including an infrared absorbing layer made of a material that absorbs infrared rays, and a light resonator disposed between the infrared reflecting layer and the infrared absorbing layer, The optical resonator may include a hollow region in a vacuum state and a dielectric layer disposed on the infrared reflecting layer and having a refractive index higher than that of vacuum.