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ALUMINUM COMPOUNDS AND METHODS OF FORMING ALUMINUM- CONTAINING FILM USING THE SAME
ALUMINUM COMPOUNDS AND METHODS OF FORMING ALUMINUM- CONTAINING FILM USING THE SAME
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机译:铝化合物和使用相同形成含铝膜的方法
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摘要
The present disclosure relates to a novel aluminum-containing compound, a method of preparing the aluminum-containing compound, a precursor composition for forming a film including the aluminum-containing precursor compound, and a method of forming an aluminum-containing film using the precursor composition for forming a film.
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