Methods used to form ferroelectric capacitors, ferroelectric field effect transistors, and electronic components containing conductive and ferroelectric materials.

摘要

PROBLEM TO BE SOLVED: To reduce a heat treatment process, improve the performance of a ferroelectric material, and the like by enabling a conductive electrode material other than TiN to be used. A ferroelectric capacitor of the present disclosure is a composite laminate containing two conductive capacitor electrodes having a ferroelectric material in between and a plurality of non-ferroelectric metal oxides having different compositions on a substrate. The plurality of nonferroelectric metal oxides having different compositions are TiO _x , AlO _x , Al ₂ O ₃ , ScO _x , Sc ₂ O ₃ , ZrO _x , YO _x , Y ₂ O ₃ , MgO. _{x, MgO, HfO x, SrO} x, SrO, Ta x O y, NbO x, GdO x, MoO x, RuO x, LaO x, V x O y, IrO x, CrO x, ZnO x, PrO x, CeO Includes composite laminates selected from _x , SmO _x , and LuO _x. [Selection diagram] FIG. 7