Sublimation purification equipment and sublimation purification method

摘要

The sublimation purification apparatus according to one embodiment of the present invention includes a vacuum chamber, a tube housing located in the vacuum chamber, a boat in close contact with the tube housing, and adjacent to the outer surface of the boat and the outer surface of the tube housing. A material to be sublimated and purified is placed on the boat, and at least one of the boat and the tube housing is formed of metal.