Separation and purification method of sublimation separation and purification equipment and sublimation material of substance

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for separation/purification of a sublimable substance, capable of fully securing a contact time between a sublimated sublimable substance and a surface for cooling precipitation to coagulate the sublimable substance and preventing a loss caused by sucking the sublimable substance before precipitated, by a vacuum pump.;SOLUTION: The separation/purification apparatus includes, in a container 5, a part 1, for heating evaporation, sublimating the sublimable substance by heating a solid mixture that contains the sublimable substance. A part 3 for cooling precipitation, precipitating the sublimated sublimable substance is provided above the part 1 for heating evaporation in the container 5. The vacuum pump 7 is connected to the container 5, and the container 5 is provided with a gas introducing part 9 for introducing carrier gas. The part 3 for cooling precipitation includes a pair of plates 33 provided in parallel with a space to each other, and cooling water flows between the pair of plates 33. Fluororesin sheets on which the sublimated sublimable substance is precipitated is detachably stuck to the respective outside surfaces of the pair of plates 33.;COPYRIGHT: (C)2013,JPO&INPIT