首页> 外国专利> ELEVATIONALLY-EXTENDING TRANSISTORS, DEVICES COMPRISING ELEVATIONALLY-EXTENDING TRANSISTORS, AND METHODS OF FORMING A DEVICE COMPRISING ELEVATIONALLY-EXTENDING TRANSISTORS

ELEVATIONALLY-EXTENDING TRANSISTORS, DEVICES COMPRISING ELEVATIONALLY-EXTENDING TRANSISTORS, AND METHODS OF FORMING A DEVICE COMPRISING ELEVATIONALLY-EXTENDING TRANSISTORS

机译:高度延伸的晶体管,包括延伸晶体管的装置,以及形成包括透过晶体管的装置的方法

摘要

A device comprises an array comprising rows and columns of elevationally-extending transistors. An access line interconnects multiple of the elevationally-extending transistors along individual of the rows. The transistors individually comprise an upper source/drain region, a lower source/drain region, and a channel region extending elevationally there- between. The channel region comprises an oxide semiconductor. A transistor gate is operatively laterally-proximate the channel region and comprises a portion of an individual of the access lines. Intra-row- insulating material is longitudinally between immediately -intra-row -adjacent of the elevationally-extending transistors. Inter-row-insulating material is laterally between immediately-adjacent of the rows of the elevationally- extending transistors. At least one of the intra-row-insulating material and the inter-row-insulating material comprises void space. Other embodiments, including method embodiments, are disclosed.
机译:设备包括阵列,该阵列包括延伸晶体管的行和列。接入线沿着行的个体互连延伸的晶体管的倍数。晶体管可单独地包括上源/漏区,下源/漏区和沟道区域,在其之间延伸。沟道区包括氧化物半导体。晶体管栅极可操作地横向横向靠近沟道区,并且包括接入线的个体的一部分。划内绝缘材料在直接延伸的晶体管的立即 - 延伸之间纵向。线间绝缘材料横向在立即相邻的直接延伸的晶体管之间。行中内绝缘材料和连续绝缘材料中的至少一个包括空隙空间。公开了包括方法实施例的其他实施例。

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