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Metal plate for manufacturing vapor deposition mask, inspection method of metal plate, manufacturing method of metal plate, vapor deposition mask, vapor deposition mask device and manufacturing method of vapor deposition mask

机译:用于制造气相沉积掩模的金属板,金属板检查方法,金属板的制造方法,气相沉积掩模,气相沉积掩模装置及气相沉积面膜的制造方法

摘要

PROBLEM TO BE SOLVED: To provide a metal plate, a method for inspecting and manufacturing a metal plate, and a method for manufacturing a vapor deposition mask, a vapor deposition mask device and a vapor deposition mask, which can stably provide a resist pattern having a narrow width on the surface of the metal plate with high adhesion. provide. SOLUTION: A metal plate test piece 50 having a surface having a longitudinal direction D1 of a metal plate and a width direction D2 orthogonal to the longitudinal direction is prepared. Of the reflected light L12 with respect to the incident light L11 incident on the surface of the test piece in the first plane P1, the first surface emitted from the surface at an angle of 45 ° ± 0.2 ° in at least one plane orthogonal to the surface. The second surface reflectance of the reflected light and the reflected light L22 with respect to the incident light L21 in the second plane P2 is measured, and when the average reflectance is 8% or more and 25% or less, it is determined to be a good metal plate. [Selection diagram] FIG. 9
机译:要解决的问题:提供一种金属板,一种用于检查和制造金属板的方法,以及用于制造气相沉积掩模,气相沉积掩模装置和气相沉积掩模的方法,这可以稳定地提供抗蚀剂图案具有高附着力的金属板表面上的窄宽度。提供。溶液:制备具有具有金属板的纵向D1的表面的金属板试验片50和与纵向垂直于纵向的宽度方向D2。反射光L12相对于入射在第一平面P1的试验片表面上的入射光L11,在至少一个平面上以45°±0.2°的角度从表面发射的第一表面。表面。测量反射光和反射光L22相对于第二平面P2中的入射光L21的第二表面反射率,并且当平均反射率为8%或更高,而25%以下时,确定为a良好的金属板。 [选择图]图。 9.

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