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Manufacturing of carbon nanotube thin film transistor backplanes and display integration thereof

机译:碳纳米管薄膜晶体管背板的制造及其显示集成

摘要

Methods for producing and integrating single-walled carbon nanotubes (SWCNT) into existing TFT backplane manufacturing lines are provided. In contrast to LTPS and oxide TFT backplanes, SWCNT TFT backplanes exhibit either equivalent or better figures of merit such as high field emission mobility, low temperature fabrication, good stability, uniformity, scalability, flexibility, transparency, mechanical deformability, low voltage and low power, bendability and low cost. Methods and processes for integrating SWCNTs technologies into existing TFT backplane manufacturing lines, pilot test and mass production can start without additional capex needs are also provided.
机译:提供了生产和将单壁碳纳米管(SWCNT)的制造成现有TFT背板制造线的方法。与LTP和氧化物TFT背板相比,SWCNT TFT背板表现出等同的或更好的优异图形,例如高场发射迁移率,低温制造,良好的稳定性,均匀性,可伸缩性,柔韧性,透明度,机械变形性,低电压和低功率,弯曲性和低成本。将SWCNTS技术集成到现有的TFT背板制造线,试验试验和批量生产的方法和过程也可以在没有额外的支出需求的情况下开始。

著录项

  • 公开/公告号US10978640B2

    专利类型

  • 公开/公告日2021-04-13

    原文格式PDF

  • 申请/专利权人 ATOM H2O LLC;

    申请/专利号US201916678491

  • 发明设计人 HUAPING LI;

    申请日2019-11-08

  • 分类号H01L51;H01L51/05;H01L27/28;H01L27/32;

  • 国家 US

  • 入库时间 2022-08-24 18:10:45

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