Power device and its resistance simulation method, and power device simulation tool

摘要

The present application relates to a resistance simulation method of a power device, the step of setting an equivalent resistance model of a power device-The connection relationship between N fingers is the _{same as the N resistors R b} connected in parallel, and the input end of the adjacent resistor R _{b is} It is connected by the resistance R _a , and the output terminal of the _{adjacent resistance R b} is connected by the _{resistance R c,} , , , R ₀ and R ₁ are the resistances of the source metal strip and the drain metal strip, respectively, R _s is the metal resistance of the first intermediate layer connecting one source region to the source metal strip, and R _D is one drain region. And calculating the resistance of the equivalent resistance model as the resistance of the power device _{, where R DEV} is the metal resistance of the second intermediate layer connected to the drain metal strip, and R DEV is the channel resistance of the power device.