POWER DEVICE AND RESISTANCE SIMULATION METHOD THEREFOR, AND POWER DEVICE SIMULATION TOOL

摘要

The present application relates to a resistance simulation method for a power device, comprising: establishing an equivalent resistance model of a power device, wherein the connection relationship of N fingers is equivalent to N resistors R_b connected in parallel, input ends of adjacent resistors R_b are connected by means of a resistor R_a, output ends of adjacent resistors R_b are connected by means of a resistor R_c,; $$ R_a=\frac{1}{N}{R}_0,R_c=\frac{1}{N}{R}_1,$$ ;and R_b=R_DEV*N+R_S+R_D, wherein R₀ and R₁ are respectively resistances of a source metal strip and a drain metal strip, R_s is a metal resistor of a first intermediate layer connecting one source region to the source metal strip, R_D is a metal resistor of a second intermediate layer connecting one drain region to the drain metal strip, and R_DEV is the channel resistance of the power device; and calculating the resistance of the equivalent resistance model as the resistance of the power device.