Line sensor angle adjustment device, defect inspection device, line sensor angle adjustment method

摘要

PROBLEM TO BE SOLVED: To provide an angle adjustment device for a line sensor capable of adjusting a mounting position of a line sensor without providing a special jig.SOLUTION: The angle adjustment device includes a first adjustment section to adjust a rotation angle that is an angle of rotation about a first axis parallel to a normal direction to the element surface of the line sensor, and a second adjustment section to adjust a tilt angle that is an angle of rotation about a second axis parallel to a scan direction of the line sensor, and an adjustment control section for making adjustment by driving at least one of the first and the second adjustment sections according to an external adjustment instruction.SELECTED DRAWING: Figure 1