METHOD OF ADJUSTING DEFECT INSPECTION DEVICE, EVALUATING METHOD OF ADJUSTING STATE OF DEFECT INSPECTION DEVICE, AND SETTING METHOD OF AZIMUTHAL ANGLE OF PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a method of easily adjusting a defect inspection device.;SOLUTION: This method is used for adjusting the defect inspection device having an illumination optical system including a polarizer 7 for radiating light emitted from a light source 1 to a sample 10 having a pattern, and a light receiving optical system including an analyzer 12 for receiving the reflected light from the surface of the sample 10 by the irradiation. The polarizer 7 and analyzer 12 are insertably/removably held in the illumination optical system and light receiving optical system, one of the polarizer 7 and the analyzer 12 is inserted, a pupil image of the light receiving optical system is acquired in the state that the other is separated, and the inserted polarizer 7 or analyzer 12 is adjusted in rotation based on the brightness pattern occurring in the acquired pupil image.;COPYRIGHT: (C)2009,JPO&INPIT